The Growth of Diamond-like Carbon Nano-Structures: Investigation of the Affecting Factors

	The Growth of Diamond-like Carbon Nano-Structures: Investigation of the Affecting Factors
Article 4, Volume 4, Issue 3, Autumn 2017, Page 205-213 PDF (1051 K)
Document Type: Original Research Paper
DOI: 10.22034/jna.2017.539363
Abstract
Using DC-Plasma Enhanced Chemical Vapour Deposition (PECVD) system, the impact of pure Co on the growth of diamond-like carbon (DLC) nano-structures were investigated. In this study, Acetylene (C2H2) was diluted in H2 and used as the reaction gas and Cobalt (Co) nano-particles were used as the catalyst. The effect of preparing Co catalyst at temperatures of 240°C and 350°C and growth conditions was studied. The results showed that the Co catalyst sputtering at 350°C temperature has a significant impact on purity, morphology, and synthesized diamond-like carbon nano-structures. This research was conducted to investigate the effect of catalyst preparation and growth conditions. Scanning Electron Microscopy (SEM), X-ray diffraction (XRD) and Raman spectroscopy were used to characterize the diamond-like carbon nano-structures produced under different conditions.
Keywords
DLC nano-structures; Temperature; DC-PECVD; Catalyst


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